Semiconductor
SMS Inc. offer a variety of high purity, low particulate generating coatings for semiconductor applications
- Alumina
- Yttria
- Titaniumv
- Aluminum
- Silicon
- Tantalum
Special coatings have also been optimized and are being currently in LED manufacturing equipment, these include high emissivity tungsten.
These coatings are applied via a variety of techniques including, thermal spray, CVD, PEO and hybrid CVD.