SMS Inc. provides thin film coatings deposited by both chemical vapor deposition (CVD) and its patent pending hybrid CVD processes. Applicable CVD coatings are aluminides, borides, chromides, carbides and silicides. The hybrid process is capable of applying transparent oxide coatings ranging from alumina, yttria, lanthana, magnesia and various combinations of these. Typical applications of CVD coatings range from gas turbines to fluid handling systems. Hybrid CVD coatings were specifically developed for the semiconductor industry where coatings such as Hybrid CVD yttria have outperformed other coatings in etch environment.